Tool SOPs

These Standard Operating Procedures (SOPs) provide detailed instructions for safely and effectively operating equipment in the ASRC Nanofabrication Facility.

• Lithography Tools

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  High-resolution pattern definition using optical and e-beam lithography.

• Deposition Tools

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  Tools for thin film deposition, including sputtering, evaporation, and ALD.

• Etch Tools

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  Equipment for plasma etching processes.

• Metrology Tools

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  Characterization and measurement of nanofabrication processes.

• Packaging Tools

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  Dicing, wirebonding, and other packaging tools.